Semiconductor Engineering· Qingpeng Wang·· 21 天前AI 评分38
自对准 CFET 架构如何将 CMOS 微缩推进到 10 Å 以下
How Self-Aligned CFET Technology Could Extend CMOS Scaling Beyond 10 Å
AI 导读
Semiverse Solutions 团队用 SEMulator3D 数字孪生工艺建模验证了一种自对准 CFET（SA-CFET）架构，通过 SA-BPR、SA-CT、SA-TSV 三个自对准模块缓解接触拥挤与金属栅隔离难题。
来源：Semiconductor Engineering · semiengineering.com